Micro-electro-mechanical transducer having an optimized non-flat surface

ABSTRACT

A method for a capacitive micromachined ultrasound transducer (cMUT) is provided. The method grows and patterns a diffusion barrier layer over a surface of a base layer. The diffusion barrier layer have different areas that allow different levels of diffusion penetration. A diffusion process is performed over the diffusion barrier layer such that a diffusion reactivated material reaches different depths into the base layer below the different areas. A anchor is formed using the diffusion reactivated material. The anchor has a lower portion below a major surface of the base layer and an upper portion above the major surface of the base layer. A cover layer is placed over the anchor and the base layer. At least one of the cover layer and the base layer includes a flexible layer, such that the cMUT electrodes are movable relative to each other to cause a change of the gap width.

CROSS-REFERENCES TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.13/229,553, filed Sep. 9, 2011, which claims the benefit of priority toU.S. patent application Ser. No. 13/018,162, filed Jan. 31, 2011, andissued as U.S. Pat. No. 8,018,301, which claims priority to U.S. patentapplication Ser. No. 12/568,225, filed Sep. 28, 2009, and issued as U.S.Pat. No. 7,880,565, which claims priority to U.S. patent applicationSer. No. 11/462,333, filed Aug. 3, 2006, and issued as U.S. Pat. No.7,612,635, which claims the benefit of U.S. Provisional Application No.60/705,606, filed Aug. 3, 2005, which applications are incorporated byreference herein in their entirety, and the benefit of the filing datesof these applications is claimed.

This application further incorporates by reference herein in entiretythe following:

International Application (PCT) No. PCT/IB2006/051566, entitledTHROUGH-WAFER INTERCONNECTION, filed on May 18, 2006;

International Application (PCT) No. PCT/IB2006/051567, entitled METHODSFOR FABRICATING MICRO-ELECTRO-MECHANICAL DEVICES, filed on May 18, 2006;

International Application (PCT) No. PCT/IB2006/051568, entitledMICRO-ELECTRO-MECHANICAL TRANSDUCERS, filed on May 18, 2006;

International Application (PCT) No. PCT/IB2006/051569, entitledMICRO-ELECTRO-MECHANICAL TRANSDUCERS, filed on May 18, 2006;

International Application (PCT) No. PCT/IB2006/051948, entitledMICRO-ELECTRO-MECHANICAL TRANSDUCER HAVING AN INSULATION EXTENSION,filed on Jun. 16, 2006;

International Application (PCT) PCT/IB2006/052657, entitledMICRO-ELECTRO-MECHANICAL TRANSDUCER HAVING AN OPTIMIZED NON-FLATSURFACE, filed on Aug. 3, 2006; and

U.S. patent application Ser. No. 11/425,128, entitled FLEXIBLEMICRO-ELECTRO-MECHANICAL TRANSDUCER, filed on Jun. 19, 2006; and

International Application (PCT) PCT/IB2006/052658, entitledMICRO-ELECTRO-MECHANICAL TRANSDUCER HAVING A SURFACE PLATE, filed onAug. 3, 2006.

Any disclaimer that may have occurred during the prosecution of any ofthe above-referenced applications is expressly rescinded, andreconsideration of all documents of record is respectfully requested.

FIELD

The present disclosure relates to micro-electro-mechanical devices thathave a movable mechanical part, particularly to micromachined ultrasonictransducers (MUT) such as capacitance micromachined ultrasonictransducers (cMUT).

BACKGROUND

Micro-electro-mechanical transducers usually share a common featurewhich includes a movable mechanical part used for energy transformation.One example of such micro-electro-mechanical transducers ismicromachined ultrasonic transducers (MUT). An ultrasound transducerperforms a chain of energy transformation to realize its function of atransducer. In its receiving mode, the acoustic energy of ultrasoundwaves propagating in a medium where the transducer is placed istransformed to mechanical energy of a movable part (conventionally avibrating membrane) in the transducer. The motion of the movable part isthen transformed to a detectable electromagnetic (usually electrical)signal. In its transmitter mode, the reverse chain of energytransformation takes place.

Various types of ultrasonic transducers have been developed fortransmitting and receiving ultrasound waves. Ultrasonic transducers canoperate in a variety of media including liquids, solids and gas. Thesetransducers are commonly used for medical imaging for diagnostics andtherapy, biochemical imaging, non-destructive evaluation of materials,sonar, communication, proximity sensors, gas flow measurements, in-situprocess monitoring, acoustic microscopy, underwater sensing and imaging,and many others. In addition to discrete ultrasound transducers,ultrasound transducer arrays containing multiple transducers have beenalso developed. For example, two-dimensional arrays of ultrasoundtransducers are developed for imaging applications.

Compared to the widely used piezoelectric (PZT) ultrasound transducer,the MUT has advantages in device fabrication method, bandwidth andoperation temperature. For example, making arrays of conventional PZTtransducers involves dicing and connecting individual piezoelectricelements. This process is fraught with difficulties and high expenses,not to mention the large input impedance mismatch problem presented bysuch elements to transmit/receiving electronics. In comparison, themicromachining techniques used in fabricating MUTs are much more capablein making such arrays. In terms of performance, the MUT demonstrates adynamic performance comparable to that of PZT transducers. For thesereasons, the MUT is becoming an attractive alternative to thepiezoelectric (PZT) ultrasound transducers.

Among the several types of MUTs, the capacitive micromachined ultrasonictransducer (cMUT), which uses electrostatic transducers, is widely used.FIG. 1 shows a cross-sectional view of a basic structure of a prior artcMUT. The cMUT 10 of FIG. 1 is built on a substrate 11. Each cMUT cellhas a parallel plate capacitor consisting of a rigid bottom electrode 12and a top electrode 14 residing on or within a flexible membrane 16 thatis used to transmit or receive an acoustic wave in the adjacent medium.The flexible membrane 16 in each cell is supported by the anchor 18. Themembrane 16 is spaced from the substrate 11 and the top electrode 12 todefine a transducing space 19 therebetween. A DC bias voltage is appliedbetween the electrodes 12 and 14 to deflect the membrane 16 to anoptimal position for cMUT operation, usually with the goal of maximizingsensitivity and bandwidth. During transmission an AC signal is appliedto the transducer. The alternating electrostatic force between the topelectrode and the bottom electrode actuates the membrane 16 in order todeliver acoustic energy into the medium (not shown) surrounding the cMUT10. During reception the impinging acoustic wave vibrates the membrane16, thus altering the capacitance between the two electrodes. Anelectronic circuit detects this capacitance change.

The two electrodes of the cMUT are usually desired to be parallel duringoperation to achieve optimum performance. Ideally, the top and bottomelectrodes may both be rigid (that is, the deflection of both electrodesis much smaller than the change of the separation distance between twoelectrodes during the operation). However, in the cMUTs reported so far,at least part of one or both electrodes is made of flexible structures(e.g., a flexible membrane, cantilever, spring, etc.), so the dynamicstatus of the two electrodes during operation may not be parallel evenif the two electrodes are designed to be substantially parallel to eachother when static.

In addition, unlike PZT transducer, the electrostatic force in cMUT isnot linearly proportional to the applied voltage and the electrodeseparation. This nonlinearity of the electrostatic actuation may degradethe transducer's performance and reliability.

Due to the importance of these MUT devices, it is desirable to improvethe technology in terms of performance, functionality, andmanufacturability in general, and to optimize transduction performance,breakdown voltage and parasitic capacitance reduction in particular. Inorder to increase the average electrical intensity and to enhancereliability, the shapes of the internal surfaces, such as the profile ofthe separation gap between two cMUT electrodes and the spring-substratecontact areas, may need to be optimized for a cMUT. This optimization isespecially desired for correcting non-parallel motion between twoelectrodes and enhancing breakdown (collapse) voltage in the cMUT.Furthermore, new methods of fabrication are decided because designshaving a special shaped surface may be difficult to fabricate using aconventional fabrication process given the very small separation betweenthe cMUT electrodes.

SUMMARY

This patent application discloses a micro-electro-mechanical transducer(such as a cMUT) having a non-flat internal surface. The non-flatsurface may include a variable curve or slope in an area where a springlayer contacts a support, thus making a variable spring model as thespring layer vibrates. The non-flat surface may also be that of anon-flat electrode optimized to compensate the dynamic deformation ofthe other electrode during operation and thus enhance the uniformity ofthe dynamic electrode gap during operation. Methods for fabricating themicro-electro-mechanical transducer are also disclosed. The methods maybe used in both conventional membrane-based cMUTs and cMUTs havingembedded springs transporting a rigid top plate.

One aspect of the present invention is a micro-electro-mechanicaltransducer comprising: a first layer having a first internal surface; asecond layer having a second internal surface opposing the firstinternal surface of the first layer to define a gap therebetween; and atransducing member is movable with at least one of the first layer andthe second layer. At least one of the first internal surface and thesecond internal surface is non-flat defining a shape profile having atleast a first zone and a second zone, the first zone defining a firstwidth of the gap, the first width being variable, and the second zonedefining a second width of the gap.

In one embodiment, the first internal surface is non-flat, and thesecond layer is supported by a contacting portion of the first internalsurface in the first zone. The second layer comprises a membrane layersupported by a graduated surface of the contacting portion of the firstinternal surface to form a wedge therebetween, and the membrane layer isdeformable along the graduated surface, creating a varying contactingsurface area in the wedge as the second layer is displaced nearer orcloser in relation to the first layer. The contacting portion of thefirst internal surface may have a substantially smooth surface,rendering the first width of the transducing gap graduatingcontinuously. Alternatively, the contacting portion of the firstinternal surface may have a stepped surface rendering the first width ofthe transducing gap graduating in steps.

In one embodiment, the first internal surface is non-flat, while thesecond layer is subject to a deformation during operation of themicro-electro-mechanical transducer, and the non-flat first internalsurface has a shape that generally conforms to the deformation of thesecond layer during operation. In an exemplary optimized design, thesecond layer is subject to a maximum deformation in the second zoneduring operation of the micro-electro-mechanical transducer. If thedeformation of the second layer during operation has a downward bulgetoward the first layer in the second zone, the first internal surface inthe second zone may be designed to have a recess relative to the firstinternal surface in the first zone. The recess at least partiallyconforms to the deformation of the second layer during operation toreduce the non-uniformity of the change of the transducing gap.

In one embodiment, the first layer comprises a substrate, the secondlayer comprises a spring layer movable through the gap defined betweenthe first layer and the second layer, and the transducing membercomprises a first electrode movable with the spring layer.

In another embodiment, the first layer comprises a mass layer, thesecond layer comprises a spring layer movable through the gap definedbetween the first layer and the second layer. The spring layer isconnected to a substrate, and the transducing member comprises a firstelectrode movable with the spring layer. The first electrode may bedisposed on the spring layer, and the transducing member may furthercomprise a second electrode disposed on the substrate. Alternatively,the first electrode may be disposed on the mass layer, and thetransducing member further may comprise a second electrode disposed onthe spring layer.

In another embodiment, at least one of the first layer and the secondlayer comprises a resilient membrane.

In one embodiment, the first layer comprises a protruding portion in thefirst zone. The protruding portion has a tapered surface providinggraduated contact with the second layer to support the second layer.

In one embodiment, the first layer comprises a substrate and a springlayer placed over the substrate. The substrate and the spring layerdefines a cavity therebetween, the cavity is bordered by a sidewall, andthe spring layer extending from the sidewall to cover the cavity. Thespring layer may comprise a conductive layer. The substrate may alsocomprise a conductive material. In one embodiment, the second layercomprises a top plate with a protruding portion having a tapered surfaceproviding graduated contact with the spring layer, wherein theprotruding portion separates the top plate from the spring layer. Thetop plate may comprise a silicon/polysilicon layer. In one embodiment,the top plate is significantly more rigid than the spring layer and issubstantially unbent when transported by a vertical displacement of theprotruding portion.

In another embodiment, the first layer comprises a substrate including aspring anchor, and the second layer comprises a spring layer and a masslayer, the mass layer being connected to the spring layer through aspring-mass connector, and the spring layer is anchored at the springanchor. The spring anchor may have a sloped shoulder defining the firstzone, wherein the sloped shoulder contacts with the spring layer to forma wedge therebetween, and the spring layer is deformable along thesloped shoulder, creating a varying contacting surface area in the wedgeas the spring layer is bent nearer or closer in relation to thesubstrate.

In some embodiments, the micro-electro-mechanical transducer furthercomprises a motion stopper disposed in the gap between the firstinternal surface and the second internal surface. The motion stopper maybe disposed on one of the first internal surface and the second internalsurface that is non-flat. The motion stopper desirably comprises aninsulating material and in a preferred embodiment further includes aninsulation extension extending into one of the first internal surfaceand the second internal surface.

Another aspect of the present invention is a micro-electro-mechanicaltransducer comprising a base layer including a first electrode; a springlayer including a second electrode separated from the first electrodedefining an electrode gap therebetween; and a support member supportingthe spring layer such that the spring layer is adapted for vibrationrelative to the base layer during transmitting or receiving a signal.One of the first electrode and the second electrode has a deformablearea subject to deformation during operation, and the other electrodehas a non-flat area at least partially conformed to the deformation ofthe deformable area of the one of the first electrode and the secondelectrode to increase uniformity of the electrode gap during operation.

In one embodiment, the support member has a graduated surface facing thespring layer, and the spring layer is deformable along the graduatedsurface of the support member, such that the spring layer has a varyingsurface area in contact with the support member when the spring layer isdisplaced nearer or closer in relation to the other layer. The graduatedsurface of the support member may comprise a step having at least twodifferent levels. The support member may be integral with the base layeror the spring layer.

In one embodiment, the base layer comprises a mass layer connected tothe spring layer through a spring-mass connector. In one embodiment,support member comprises a substrate and an anchor standing on thesubstrate; the spring layer is placed over the anchor to define a cavitybetween the spring layer and the substrate; and the cavity is borderedby the anchor, the spring layer extending from the anchor to cover thecavity. The support member may be an integral part of the substrate. Thesubstrate may comprise a conductive material. The mass layer may besignificantly more rigid than the spring layer and be substantiallyunbent when transported by a vertical displacement of the supportmembers.

In another aspect of the present invention is a micro-electro-mechanicaltransducer comprising: a first layer including a spring layer and afirst electrode; a second layer including a second electrode; and aspring anchor supporting the spring layer to form a cantilever having avariable cantilever length. At least one of the first layer and thesecond layer has a non-flat surface defining a nonuniform gaptherebetween. In one embodiment, the spring layer contacts a curvedsurface of the spring anchor, and the variable cantilever length variesas the spring layer deforms along the curved surface of the springanchor. In another embodiment, the spring layer is connected to a curvedsurface the second layer, and the variable cantilever length varies asthe spring layer deforms along the curved surface of the second layer.In yet another embodiment, the spring layer is connected to the secondlayer through a connector having a curved surface, and the variablecantilever length varies as the spring layer deforms along the curvedsurface of the connector.

In one embodiment, the second layer is a rigid surface plate.Alternatively, the second layer comprises a substrate having a cavityover which the cantilever extends, and the micro-electro-mechanicaltransducer further comprises a mass layer connected to the spring layerthrough a spring-mass connector.

Another aspect of the present invention is a method for fabricating amicro-electro-mechanical transducer. The method comprises the steps of:

(a) growing and patterning diffusion barrier layer over a surface of abase layer, the diffusion barrier layer having an opening leaving acorresponding part of the surface of the base layer uncovered;

(b) performing a diffusion process over the diffusion barrier layerincluding the opening such that a diffusion reactivated material reachesa first depth into the base layer at where the opening is located and asecond depth into the base layer at positions covered by the diffusionbarrier layer, the first depth being greater than the second depth;

(c) removing the diffusion barrier layer and the diffusion reactivatedmaterial to form a step on the surface of the base layer; and

(d) forming a cover layer over the stepped surface of the base layer todefine a stepped gap therebetween.

The diffusion barrier layer may be an oxide layer, a nitride layer or acombination thereof. The diffusion reactivated material may be an oxide.The steps of (a), (b), and (c) may be repeated to form additional levels(steps) of the surface of the base layer. Before forming the coverlayer, an anchor may be formed on the stepped surface of the base layer.The anchor is taller than the stepped surface such that the cover layeris supported by the anchor and clear of the stepped surface of the baselayer. Furthermore, an insulation layer may be formed over the steppedsurface of the base layer; the base layer may have a conductivematerial; the cover layer may also have a conductive material.Alternatively, the cover layer can be placed directly on a protrudingportion of stepped surface.

In some embodiments, the step of forming the cover layer comprises:bonding an SOI layer carrying the cover layer over the stepped surfaceof the base layer; and etching back the SOI layer to leave the coverlayer over the stepped surface of the base layer.

In some embodiments, the step of growing and patterning diffusionbarrier layer comprises: growing and patterning a first diffusionbarrier layer over a surface of a base layer; and growing and patterninga second diffusion barrier layer over the first diffusion barrier layer.

In one embodiment, the cover layer comprises a membrane layer having aperimeter fixed at a support wall on the base layer.

In another embodiment, the cover layer comprises a spring layer anchoredat a spring anchor on the base layer to form a cantilever. The baselayer may comprise a substrate, the method may further comprise forminga mass layer over the spring layer, the mass layer being connected tothe spring layer through a spring-mass connector.

Another aspect to the present invention is a method for fabricating amicro-electro-mechanical transducer, the method comprising the steps of:forming a plurality of posts on a substrate, each post having a top endstanding from the substrate; rounding corners of the top ends of theplurality of posts to form a tapered top surface on each post; andintroducing a membrane layer over the top ends of the plurality ofposts. In one embodiment, the base layer comprises a substrate and thecover layer comprises a spring layer. In another embodiment, the baselayer comprises a mass layer and the cover layer comprises a springlayer connected to a substrate.

In one embodiment, the step of rounding corners of the top ends of theplurality of posts comprises treating the plurality of posts usinghydrogen annealing at a desired temperature. In another embodiment, thestep of rounding corners of the top ends of the plurality of postscomprises oxidizing the top ends. Furthermore, an insulation layer maybe formed over the tapered top surface of the plurality of posts.

Another aspect of the present invention is a method for fabricating amicro-electro-mechanical transducer, the method comprising the steps of:(a) forming a non-flat surface on a first wafer, the non-flat surfacecomprising a first area having a first height and a second area having asecond height, the first height being greater than the second height,wherein the first area has a tapered top surface; (b) forming a membranelayer over the tapered top surface of the first area of the first wafer;(c) forming a post on the membrane layer or a second wafer, the posthaving a top surface standing away from the second wafer; and (d)bonding the second wafer to the membrane layer with the post contactingdisposed therebetween.

The stepped surface on the first wafer may be formed using methods asdescribed in the other embodiments of the present invention, such asgrowing and patterning oxide and/or nitride layers over a surface of thefirst wafer. The first wafer may be an SOI wafer including a platelayer, the method further comprising etching back the SOI wafer to leavethe plate layer in the micro-electro-mechanical transducer.

Another aspect of the invention is a method for fabricating amicro-electro-mechanical transducer, the method comprising the steps of:forming a flexible layer having a desired thickness profile; placing theflexible layer over a base layer such that the flexible layer issupported by a support wall, the flexible layer and the base layerdefining a cavity therebetween; and bending the flexible layer into adesired shape. The support wall may be formed either on the base layeror on the flexible layer. The flexible layer may be bent downward to thebase layer such that at least a part of the flexible layer contacts asurface of the base layer in the cavity. The flexible layer may be bentupward from the base layer.

In one embodiment, the thickness profile of the flexible layer comprisesa first wall having a first height and a second wall having a secondheight. The first height is greater than the second height. The flexiblelayer contacts the base layer through the first wall before bending. Theflexible layer may be bent downward such that the flexible layercontacts the base layer through the second wall after bending. Theflexible layer may alternatively be bent upward such that the flexiblelayer has a raised top surface above the second wall after bending.

In one embodiment, a membrane layer is placed over the bent flexiblelayer, wherein the membrane layer is supported by a support member todefine a nonuniform transducing gap between the membrane layer and thebent flexible layer. The support member may be a protruding portion ofthe bent flexible layer. The support member may be a post formed on thebent flexible layer.

Yet another aspect of the present invention is a method for fabricatinga micro-electro-mechanical transducer, the method comprising the stepsof:

(a) forming a wall on a substrate, the wall defining a cavity;

(b) placing a first membrane layer over the cavity such that the firstmembrane layer is supported by the wall on the substrate, the firstmembrane and the substrate together comprising a bottom electrode orbeing adapted for hosting a bottom electrode;

(c) bending the first membrane layer into a desired shape; and

(d) placing a second membrane layer over the first membrane layer,wherein the second membrane layer comprises a top electrode or beingadapted for hosting a top electrode, and the second membrane layer andthe bent first membrane layer define a transducing gap having anonuniform width.

In one embodiment, the first membrane layer is bent downward such that apart of the first membrane layer touches the substrate after bending andis bonded thereto. In another embodiment, the first membrane layer isbent upward such that a part of the first membrane layer has a raisedtop surface.

Bending the first membrane layer may be accomplished by annealing thefirst membrane layer at a desired temperature and pressure. Using asemiconductor material for the first membrane layer, bending the firstmembrane layer may be accomplished by selectively doping the firstmembrane layer using a doping material with a doping profile tointroduce a desired stress profile in the first membrane layer, andannealing the doped first membrane layer at a desired temperature andpressure. Alternatively, bending the first membrane layer may beaccomplished by forming a stress layer on the first membrane layer, andannealing the first membrane layer and the stress layer at a desiredtemperature and pressure. The stress layer has a desired stress profileto assist bending the membrane layer.

In one embodiment, before placing the second membrane layer over thefirst membrane layer, an insulation layer is formed over the firstmembrane layer.

The foregoing and other features and advantages will become moreapparent from the following detailed description of several embodiments,which proceeds with reference to the accompanying figures.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows a cross-sectional view of a basic structure of a prior artcMUT.

FIGS. 2A-2B show schematic views of a micro-electro-mechanicaltransducer having a non-flat electrode in accordance with the presentinvention.

FIG. 3 shows a schematic view of another aspect of themicro-electro-mechanical transducer of the present invention.

FIG. 3A shows the micro-electro-mechanical transducer of FIG. 3 having amotion stopper.

FIG. 4 shows a schematic view of another micro-electro-mechanicaltransducer having a non-flat electrode in accordance with the presentinvention.

FIG. 5 shows a schematic view of another micro-electro-mechanicaltransducer having a non-flat electrode in accordance with the presentinvention.

FIGS. 6A-6B show a schematic view of a micro-electro-mechanicaltransducer having a simple two-leveled electrode in accordance with thepresent invention.

FIG. 6C shows the micro-electro-mechanical transducer of FIGS. 6A-6Bhaving a motion stopper.

FIGS. 7A-7C show a schematic view of another micro-electro-mechanicaltransducer having a multi-leveled electrode in accordance with thepresent invention.

FIG. 7D shows the micro-electro-mechanical transducer of FIGS. 7A-7Chaving a motion stopper.

FIG. 8 shows an example of an embedded-spring cMUT having in non-flatinternal surface in accordance with the present invention.

FIG. 9 shows another example of an embedded-spring cMUT having innon-flat internal surface in accordance with the present invention.

FIG. 10 shows another example of an embedded-spring cMUT having innon-flat internal surface in accordance with the present invention.

FIGS. 11A-11C show a fabrication process for making a recess or recessesof a desired shape on an oxidizable substrate using oxidation anddiffusion barriers.

FIGS. 12A-12D show an example of fabrication process for making a recessor recesses having a continuous shape and at least one wedge-likeshoulder portion using oxidation and diffusion barriers.

FIGS. 13A-13D show another example of fabrication process for making arecess or recesses having a continuous shape and at least one wedge-likeshoulder portion using oxidation and diffusion barriers.

FIGS. 14A-14E show another example of fabrication process for making arecess or recesses having a continuous shape with a controlled curvatureusing oxidation and diffusion barriers.

FIGS. 15A-15G show an exemplary fabrication process for making amicro-electro-mechanical transducer having a stepped surface.

FIGS. 16A-16G show another exemplary fabrication process for making amicro-electro-mechanical transducer having a stepped surface.

FIGS. 17A-17E show an exemplary fabrication process to make localizednon-flat areas to effectuate a variable spring model without affectingother areas of the electrodes.

FIGS. 18A-18F show an alternative fabrication process to make localizednon-flat areas to effectuate a variable spring model without affectingother areas of the electrodes.

FIGS. 19A-19H show an alternative fabrication process to make a non-flatsurface in a micro-electro-mechanical transducer in accordance with thepresent invention.

FIGS. 20A-20F show another fabrication process to make a non-flatsurface in a micro-electro-mechanical transducer in accordance with thepresent invention.

FIGS. 21A-21E show another fabrication process to make a non-flatsurface in a micro-electro-mechanical transducer in accordance with thepresent invention.

FIGS. 22A-22E show another fabrication process to make a non-flatsurface in a micro-electro-mechanical transducer in accordance with thepresent invention.

FIGS. 23A-23I show a fabrication process to make ESMUT having a non-flatsurface in accordance with the present invention.

FIGS. 24A-24I show another fabrication process to make ESMUT having anon-flat surface in accordance with the present invention.

FIGS. 25A-25I show another fabrication process to make ESMUT having anon-flat surface in accordance with the present invention.

FIGS. 26A-26D show an exemplary fabrication process to roughen thebottom surface of the cavity and to fabricate buffer trenches on thebottom of the cavity.

DETAILED DESCRIPTION

The micro-electro-mechanical transducer such as a capacitivemicromachined ultrasonic transducer (cMUT) of the present invention willbe described in detail along with the figures, in which like parts aredenoted with like reference numerals or letters. Fabrication methods formaking the micro-electro-mechanical transducer of the present inventionare also disclosed. These methods may be used in combination with anysuitable methods, particularly using the methods disclosed in theseveral patent applications identified herein.

The invention has been described below with reference to specificembodiments. In most cases, a cMUT structure is used to illustrate theinvention. It is appreciated, however, that the present invention is notlimited to cMUTs. It will be apparent to those skilled in the art thatvarious modifications may be made and other embodiments can be usedwithout departing from the broader scope of the inventions. Therefore,these and other variations upon the specific embodiments are intended tobe covered by the present inventions. Those skilled in the art willrecognize that various features disclosed in connection with theembodiments may be used either individually or jointly.

In this document, a conductive material is defined as one having aresistivity less than 1×104 Ω-cm. Silicon and polysilicon materials aretherefore considered conductive materials in this context. A goodconductive material preferably has a resistivity less than 1 Ω-cm. Theterms “insulation material”, “insulating material” and “dielectricmaterial” are used interchangeably unless noted otherwise, and aredefined as one having a resistivity greater than 1×104 Ω-cm. A goodinsulation/insulating material preferably has a resistivity greater than1×108 Ω-cm. An insulator generally comprises an insulating material butin special cases may include air and vacuum.

It is noted that the terms “transducer” and “transducing member” areused in a broad sense in the present description to not only includedevices that perform both actuation and sensing functions but alsoinclude devices that perform either an actuation function or an sensingfunction.

One aspect of the present invention relates to optimization of the shapeof the separation gap between two electrodes in amicro-electro-mechanical transducer such as cMUT. In the figures used inthis description, an exemplary cMUT design may be used to illustrate howto implement the design concepts and the methods into a cMUT design andfabrication. However, the designs and methods described herein may begenerally used in the design and fabrication of any kind of cMUTs (e.g.,cMUTs with embedded springs, and cMUTs with flexible membrane surface),and further many other types of micro-electro-mechanical transducers.

One characteristic of the prior art cMUT as shown in FIG. 1 is that inan unbiased and static condition, the two electrodes (12 and 14) areparallel to each other to define a uniform distance there between. Thiswould be an effective configuration to achieve a uniform gap between twoelectrodes desired for optimal performance if the separation gap betweentwo electrodes has a uniform change during operation (e.g., oneelectrode has a parallel movement relative to the other electrode duringthe transducer operation). However, in most cMUTs, at least one of twoelectrodes is deformed during the operation, either because of anelectric bias applied or a dynamic deformation. As a result, theeffective change of the separation gap between two electrodes becomesnon-uniform, thus affecting the performance of the transducer. Forexample, the electrostatic field may work more efficiently at a locationof a large deformation, and less or non-efficiently at a location of asmall deformation.

Another related characteristic of the prior art cMUT is that themembrane area between the support anchors 18 is roughly a constantbecause of the non-gradual nature of the support anchors 18. Thisresults in a relatively constant spring model. That is, the equivalentspring has a fixed spring mass and spring constant, except for a slightincrease of the spring constant with deformation due to materialstiffing effect under stress condition. Because the electrostaticpressure is not linearly proportional to the electrode separation, thedisplacement is not linearly proportional to the drive voltage.Moreover, for a cMUT, usually there exists a collapse voltage for agiven electrode separation gap, and a minimum electrode separation gapfor an applied voltage. A constant spring model therefore limits thetransducer operation range (for both displacement and voltage) andcauses some reliability problem. To alleviate these problems, thepresent invention discloses a micro-electro-mechanical transducer (suchas a cMUT) with a variable spring constant to compensate thenonlinearity of the electrostatic pressure is desired.

FIGS. 2A-2B show schematic views of a micro-electro-mechanicaltransducer having a non-flat internal surface in accordance with thepresent invention. The micro-electro-mechanical transducer has a bottomlayer 210 and the top layer 220. The bottom layer 210 has a non-flatshape. In the example shown in FIG. 2A, the surface of the bottom layer210 is curved and generally has two zones 211 and 212. The zone 211contacts the top layer 220. The zone 211 has a graduated surface to forma wedge between the top layer 220 and the bottom layer 210. Thisprovides a variable contacting area to the top layer 220 depending onthe degree of deformation of the top layer 220.

The bottom layer 210 may provide a bottom electrode (not separatelyshown), either by including a separate conductive layer or by using aconductive material for the bottom layer 210 itself. The top layer 220may provide a top electrode (not separately shown), either by includinga separate conductive layer or by using a conductive material for thetop layer 220 itself. If both the top layer 220 and the bottom layer 210are fully covered by electrodes, a thin insulation layer (not shown) mayneed to be placed on the surface of one of the top layer 220 and thebottom layer 210. However, a top electrode or a bottom electrode doesnot have to cover the entire surface of the bottom layer 210 and furtherdoes not have to be in a non-flat shape as the surface of the bottomlayer 210, unless a non-flat electrode is desired for improvinguniformity of the electrode gap as shown below in FIGS. 3-5.

As shown in FIG. 2B, as the top layer 220 is displaced and bent towardthe bottom layer 210, the contacting area in zone 211 increases.Correspondingly, the effective membrane spring area A for the springmodel decreases, changing both the spring mass and the spring constant.This design thus effectively provides a dynamic spring model having avariable spring constant. This may be advantageous in terms ofcollapsing control. For example, as the voltage applied across the twoelectrodes increases, the effective membrane spring area A decreases toresult in an increase in the spring strength of the vibrating membrane(top layer 220). This pushes the transducer collapse voltage higher. Thecollapse of the transducer may be avoided as long as the increasingspring strength is adequate to balance the electrostatic force.

FIG. 3 shows a schematic view of another aspect of themicro-electro-mechanical transducer of the present invention. Themicro-electro-mechanical transducer in FIG. 3 has the same basicstructure of the micro-electro-mechanical transducer in FIGS. 2A-2Bexcept that at least one non-flat surface is an electrode surface.Bottom layer 310 provides a bottom electrode and the top layer 320provides a top electrode. The bottom layer 310 has a non-flat (curved)shape which, in the particular example shown in FIG. 3, is characterizedby a downward crater in the center. During operation, the top layer 320has a deformed shape as represented by dashed lines. In the exampleshown, this dynamic deformation of the top layer 320 (including the topelectrode therein) has a downward bulge. Preferably, the curved shape ofthe non-flat bottom layer (including the bottom electrode) 310 isdesigned to closely match the downward bulge of the top layer 320 tocompensate the deformation of the top layer 320. As a result of thiscompensation, the effect of dynamic separation gap between the twoelectrodes are more uniform than it would be if both the bottom layer310 and the top layer 320 have a flat shape when they are unbiased andstatic. Generally, the static gap separation is smaller at a locationwhere a smaller deformation or displacement of the electrodes mightoccur.

In order to improve insulation property and avoid electric shorting, amotion stopper may be disposed in the gap between the internal surfacesof the transducer. FIG. 3A shows the micro-electro-mechanical transducerof FIG. 3 having a motion stopper. The motion stopper 335 is disposed onthe bottom layer 310 that is non-flat in the configuration shown, butmay also be placed on the top layer 320. The motion stopper 335desirably comprises an insulating material and in a preferred embodimentfurther includes an insulation extension 335 a extending into the bottomlayer 310 further enhance the insulation performance without increasingthe separation gap between the two electrodes in the bottom layer 310and the top layer 320.

FIG. 4 shows a schematic view of another micro-electro-mechanicaltransducer having a non-flat electrode in accordance with the presentinvention. The micro-electro-mechanical transducer in FIG. 4 is similarto that shown in FIGS. 2A-2B and 3. However, themicro-electro-mechanical transducer in FIG. 4 has a separate layer 424which is placed on the top layer 422, and may serve as a top electrode.The separate layer 424 may be a part of the top electrode. In addition,the layer 424 covers only a central part of the top layer 422. Inoperation, the layer 424 moves (displaces) along with the top layer 422.In this configuration, although the top layer 422 may still deform inoperation, the degree of deformation in the area covered by the layer424 may be smaller than it is in the transducer of FIGS. 2A-2B and FIG.3. Accordingly, the bottom layer 410 has a relatively flat central area412 to match the smaller deformation of the top layer 422 and the layer424. In this exemplary configuration, the wedge-like gap between the toplayer 422 and the non-flat bottom layer 410 not only makes variableequivalent spring strength, but also increases the electrical fieldintensity between the two electrodes by enhancing the uniformity of theelectrode gap. Alternatively, the top layer 424 may not be a part of theelectrode. This design may have less parasitic capacitance, although itmay also result in a weaker average electrical field in the transducinggap compared to that in FIG. 2A and FIG. 2B.

FIG. 5 shows a schematic view of another micro-electro-mechanicaltransducer having a non-flat electrode in accordance with the presentinvention. The transducer in FIG. 5 is similar to that shown in FIGS.2A-2B and 3. However, an insulation layer 505 is added on top of bottomlayer (electrode) 501 to improve the insulation properties betweenbottom layer 501 and top layer (electrode) 520. In this case, theinsulation layer 505 may be allowed to contact the top electrode 520during transducer operation so that the transducer may have a variablespring strength as that shown in FIGS. 2A and 2B. Optionally, theinsulation layer 505 may be added on the bottom surface of the top layer520 instead.

It is appreciated that the wedge shapes shown above are merely for thepurpose of illustration. In particular, the edges of the wedge-like gapbetween the two contacting layers may have various sizes with differentcurvatures, depending on the design requirements.

Generally, the height of the separation gap between the cMUT electrodes,especially for the high frequency cMUT, is relative small. Thewedge-like gap shown above may be difficult to be fabricated using thegeneral lithography and etching process. To overcome these difficulties,various novel methods are disclosed in this description for fabricatinga desired shape on the surface with very small dimensions.

At the same time, instead of forming a shape having a continuouscurvature, a simple step or multiple steps on one or both electrodes maybe formed to have a leveled or multi-leveled surface. The higherlevel(s) on the surface may correspond to smaller deformation ordisplacement of the deformable electrode in the transducer, while lowerlevels may correspond to greater deformation or displacement. Thissimple approach still benefit from the advantage of increasing theaverage electrical field intensity in the electrode separation gap.

FIGS. 6A-6B show a schematic view of a micro-electro-mechanicaltransducer having a simple two-leveled internal surface in accordancewith the present invention. The transducer in FIG. 6A has bottom layer601 which may include the bottom electrode (not separately shown) and aninsulation layer 640, and top layer 620 which may include a topelectrode (not separately shown). Similar to other transducers shownherein, the bottom electrode may be provided by either using aconductive bottom layer 601 or using a separate conductive layer placedon a substrate, or a combination thereof. Likewise, the top electrodemay be provided by either using a conductive top layer 620 or using aseparate conductive layer included in the top layer 620, or acombination thereof. The top layer 620 is connected to the bottom layer601 through supports 630. If both the top layer 620 and bottom layer 601are electrodes, the supports 630 should preferably be made of aninsulation material and further preferably include an insulationextension which extends below the adjacent surface of the bottom layer601 to further improve the transducer performance.

The bottom layer 601 and the insulation layer 640 are characterized by anon-flat surface which has a simple stepped configuration. Theinsulation layer 640 is optional if the motion stop (not shown) is usedin the transducer to prevent the electrical shorting. Specifically, thesurface of the bottom layer 601 and the insulation layer 640 has level641 and level 642 which is lower than level 641, forming a step. Thisstepped surface defines a nonuniform transducing gap between the twoelectrodes. As shown in FIG. 6B, at a certain level of deformation ofthe top layer 620, the top layer 620 contacts the level 641 to define asmaller area A of the spring membrane (a top layer 620 in this example),resulting in a greater spring strength. Unlike the case in FIGS. 2A and2B where the spring strength is continuously variable within a range,the variable spring in FIGS. 6A and 6B has only two discrete levels ofthe spring strength. This configuration is perhaps the simplestembodiment of the general concept of using a non-flat electrode as shownabove. Although a simple stepped configuration as shown in FIGS. 6A-6Bmay not provide optimal performance, it nevertheless has an advantage ofsimplicity in fabrication. In micro-electro-mechanical transducers, thetransducing gap between the two electrodes tends to have a very smalloverall width, posing a challenge for fabricating a more refinednon-flat surface of the electrode.

FIG. 6C shows the micro-electro-mechanical transducer of FIGS. 6A-6Bhaving a motion stopper. The motion stopper 635 is disposed on thebottom layer 601 that is non-flat in the configuration shown (mostspecifically in the middle of the low-level 642), but may also be placedon the top layer 620. However, one or multiple motion stoppers withdesired height may be placed in any location within electrode gap toachieve the same function. Preferably, the motion stopper(s) are placedin locations where the movable portion of the transducer is likely toexperience maximum displacement. The motion stopper 635 desirablycomprises an insulating material and in a preferred embodiment furtherincludes an insulation extension 635 a extending into the bottom layer601 further enhance the insulation performance without increasing theseparation gap between the two electrodes in the bottom layer 601 andthe top layer 620.

FIGS. 7A-7C show a schematic view of another micro-electro-mechanicaltransducer having a multi-leveled electrode in accordance with thepresent invention. The transducer in FIG. 7A has bottom layer 701including the bottom electrode (not separately shown) and an insulationlayer 740, and top layer 720 including a top electrode (not separatelyshown). The top layer 720 is connected to the bottom layer 701 throughsupports 730. The bottom layer 701 and the insulation layer 740 arecharacterized by a non-flat surface which has a multi-steppedconfiguration. Specifically, the surface of the bottom layer 701 and theinsulation layer 740 has levels 741, 742, 743 and 744, forming severalsteps. This stepped surface defines a nonuniform transducing gap betweenthe two electrodes. This is a more refined configuration compared to thesimplest configuration shown in FIGS. 6A and 6B. As shown in FIG. 7B, ata certain level of deformation of the top layer 720, level 741 replacessupports 730 to define a smaller area A of the spring membrane (a toplayer 720 in this example), resulting in a greater spring strength. Atthe next level of deformation, level 742 replaces level 741 to define aneven smaller area A left the spring membrane to result in a stillgreater spring strength. Although the spring strength is still notcontinuously variable, the variable spring in FIGS. 7A-7C has threediscrete levels of the spring strength, an improvement from theconfiguration shown in FIGS. 6A-6B. It is appreciated that as the numberof levels increase, the property of the variable spring approaches thatof a continuously variable spring. As described herein, themulti-stepped configuration in FIGS. 7A-7C may be fabricated using asimilar method for fabricating the simple single-stepped configurationin FIGS. 6A-6B. As the number of levels increase, however, thecomplexity of the fabrication process also increases, gradually negatingthe simplicity advantage of this technique.

FIG. 7D shows the micro-electro-mechanical transducer of FIGS. 7A-7Chaving a motion stopper. The motion stopper 735 is disposed on thebottom layer 701 that is non-flat in the configuration shown (mostspecifically in the middle of the low-level 744), but may also be placedon the top layer 720. The motion stopper 735 desirably comprises aninsulating material and in a preferred embodiment further includes aninsulation extension 735 a extending into the bottom layer 701 furtherenhance the insulation performance without increasing the separation gapbetween the two electrodes in the bottom layer 701 and the top layer720.

Furthermore, it is appreciated that the steps shown in FIGS. 6A-6C andFIGS. 7A-7D may have rounded corners instead of sharp corners as shown.The fine features such as the corner shapes of the steps will depend onthe fabrication process, particularly the type of technique used to formthe steps. In general, oxidation methods as described herein result inrounder corners than many other methods.

If the gap height is reasonably large, the pattern on bottom electrodesshown in FIGS. 6A-6C and FIGS. 7A-7D may be formed by directly etchingsubstrate with proper masks. If the gap height is too small, even asimple stepped surface may be difficult to be formed using aconventional etch process. In this case, other methods such as thatusing oxidation process or LOCOS-like processes described herein mayneed to be used to form the non-flat surface.

The methods in accordance with the present invention may not only beapplied in conventional cMUT designs, but also advantageously inembedded-spring micromachined ultrasonic transducers (ESMUTs) asdisclosed in the several patent applications referenced and incorporatedherein. This combination takes advantage of the design flexibility andperformance characteristics of the ESMUTs.

FIG. 8 shows an example of an embedded-spring cMUT having in non-flatinternal surface in accordance with the present invention. FIG. 8 is anenlarged view of a selected portion 800 of an embedded springmicro-electro-mechanical transducer (ESMUT). The ESMUT portion 800 is apart of a complete ESMUT element (not shown). The structure of theselected ESMUT portion 800 provides a basis to understand the completeESMUT element as described in the several PCT patent applicationsreferenced herein.

For certain application such as an ESMUT with a high operationfrequency, a full ESMUT element or device may use only one basic unitlike ESMUT portion 800. For other applications, it may be preferred touse a combination of multiple basic units shown in FIG. 8.

The ESMUT portion 800 is built on a substrate 801, on top of which thereis a standing feature (referred to as “anchor” hereinafter) 810 havingtwo sidewalls on two opposing sides bordering cavities 812 and 812 a,respectively. The standing feature (anchor) 810 may be an integratedpart of the substrate 801 formed as a result of forming the cavities 812and 812 a, but may also be an additional structure added onto a separatesubstrate. In one embodiment, for example, the anchor 810 is part of themiddle spring layer 820. The substrate of 801 may be made of either anonconductive material or a conductive material such as silicon orpolysilicon. In a configuration where the anchor 810 is a separatestructure, conductivity of the anchor 810 may be the same as ordifferent from that of the substrate 801. For example, the substrate 801may be made of a nonconductive material while the anchor 810 aconductive material such as metal, silicon or polysilicon.

The ESMUT portion 800 shown has two cavities 812 and 812 a long theopposing sides of anchor 810. Depending on how and where the ESMUTportion 800 is taken from the ESMUT element, the second cavity 812 a mayeither belong to a different and separate cavity, or just anotherportion of a same circular or extended cavity as the first cavity 812.

The ESMUT portion 800 further has these components: (a) a middle springlayer 820, preferably an elastic membrane, placed on a top side of theanchor 810; (b) a bottom electrode 825 placed on the middle spring layer820; (d) a top plate 840 connected to the middle spring layer 820through connection areas 830 and 830 a; and (e) a top electrode 850.

The ESMUT 800 in FIG. 8 is characterized in that the bottom side of thetop plate 840 has a non-flat shape having a concave middle area 841above the bottom electrode 825 and protruding connection areas 830 and830 a. The top plate 840 is connected to the middle spring layer 820through the protruding connection areas 830 and 830 a which separate theconcave middle area 841 of the top plate 840 from the bottom electrode825. The protruding connection areas 830 and 830 a each has a graduatedsurface facilitating the variable contact area between the connectionareas 830/830 a and the middle spring layer 820 depending on the degreeof displacement of the top plate 840 and the deformation of the middlespring layer 820. In general, the larger at the displacement and thedeformation, the greater the contact area is, thus resulting in avariable spring model. As will be shown in FIG. 9 below, the non-flatsurface may also be deployed on other surfaces such as the anchor 810.

As shown in FIG. 8, the bottom side of the top plate 840 faces the topside of the middle spring layer 820, and the bottom side of the middlespring layer 820 faces the front side of the substrate wafer, wherebythe protruding connection areas 830/830 a define a transducing space 860below the top plate 840. The transducing space 860 is generally definedbetween the top plate layer 840 and the top surface of the middle springlayer 820 or the top surface of the anchor 810, whichever is higher.Where there is an intervening layer between the top plate layer 840 andthe top surface of the middle spring layer 820 or the top surface of theanchor 810, the available transducing space may be reduced. For example,if another layer (such as an insulation layer, not shown) is depositedover the middle spring layer 820 or the anchor 810, the top surface ofthe anchor is defined as the uncovered surface of the additional layerdeposited over the anchor 810.

Depending on how and where the ESMUT portion 800 is taken from the ESMUTelement 800, the connecting areas 830 and 830 a may each be a part oftwo different and separate connectors, or just different portions of asame circular or extended connecting area.

The top plate 840 may be adapted to serve as a surface plate of thetransducer to interface with a medium. Because the top plate 840 isconnected to the spring layer 820, it generally contributes mass to theequivalent spring system and therefore can be treated as a mass layer.In the above embodiment shown, the top plate 840 also includes orcarries a top electrode 850. However, in some other embodiments of thepresent invention, the top plate 840 may serve as a mass layer onlywithout including or carrying an electrode, as disclosed inInternational Application (PCT), entitled MICRO-ELECTRO-MECHANICALTRANSDUCER HAVING A SURFACE PLATE, Attorney Docket No. 03004.08, filedon even date with the present application by a common applicant, whichpatent application is fully incorporated herein by reference.

FIG. 9 shows another example of an embedded-spring cMUT having innon-flat internal surface in accordance with the present invention.Similar to FIG. 8, FIG. 9 is an enlarged view of a selected portion 900of an embedded spring micro-electro-mechanical transducer (ESMUT). TheESMUT portion 900 is built on a substrate 901, on top of which there isan anchor 910 having two sidewalls on two opposing sides borderingcavities 912 and 912 a, respectively. The anchor 910 may be anintegrated part of the substrate 901 formed as a result of forming thecavities 912 and 912 a, but may also be an additional structure addedonto a separate substrate.

The ESMUT structure portion 900 further has these components: (a) amiddle spring layer 920, preferably an elastic membrane, which is placedon a top side of the anchor 910; (b) a bottom electrode 925 placed onthe middle spring layer 920; (d) a top plate 940 connected to the middlespring layer 920 through connectors 930 and 930 a; and (e) a topelectrode 950.

The top plate 940 is connected to the middle spring layer 920 throughthe connectors 930 and 930 a which separate the top plate 940 from thebottom electrode 925 and the spring layer 920. As shown in FIG. 9, thebottom side of the top plate 940 faces the top side of the middle springlayer 920, and the bottom side of the middle spring layer 920 faces thefront side of the substrate wafer, whereby the connectors 930/930 adefine a transducing space 960 below the top plate 940.

The ESMUT 900 in FIG. 9 is characterized in that the anchor 910 hassloped shoulders 908 and 908 a each having a graduate surface to formwedge-shaped openings 912 and 912 a between the anchor 910 and thespring layer 920. This structure makes a variable contact area betweenthe sloped shoulders 908/908 a of the anchor 910 and the middle springlayer 920, depending on the degree of displacement of the top plate 940and the deformation of the middle spring layer 920. In general, thelarger displacement and the deformation are, the greater the contactarea is, thus resulting in a variable spring model.

As shown in FIG. 9 above, the non-flat surface may also be deployed onother surfaces such the bottom of the top plate or the spring layer. Inprinciple, the non-flat surface may also be deployed on the spring layer(820 in FIG. 8 or 920 in FIG. 9) to achieve the similar variable springresults as shown in FIG. 10.

FIG. 10 shows another example of an embedded-spring cMUT having innon-flat internal surface in accordance with the present invention.Similar to FIGS. 8-9, FIG. 10 is an enlarged view of a selected portion1000 of an embedded spring micro-electro-mechanical transducer (ESMUT).The ESMUT portion 1000 is built on a substrate 1001, on top of which isan anchor 1010 defining cavity 1012. The anchor 1010 may be anintegrated part of the substrate 1001, but may also be an additionalstructure added onto a separate substrate.

The ESMUT structure portion 1000 is characterized by a non-flat middlespring layer 1020 which has raised (protruding) end portions 1030 tosubstitute connectors 930 in FIG. 9. The ESMUT structure portion 1000further has these components: (a) a bottom electrode 1022 which iseither a separate layer placed on the middle spring layer 1020 or a partof a conductive middle spring layer 1020; (b) a top plate 1040 connectedto the middle spring layer 1020 through the raised end portions of themiddle spring layer 1020; (c) an insulation layer 1045 under the topplate 1040; and (e) a top electrode 1050. Alternatively, the insulationlayer 1045 may be placed on top of the curved middle spring layer 1020and conforms to the curved shape thereof.

As shown, the raised end portions 1030 of the middle spring layer 1020each has a curved top surface contacting the top plate 1040 (through theinsulation layer 1045 in the example shown). As the flexible middlespring layer 1020 deforms, it makes a variable contact with the topplate 1040. This design therefore also effectuates a variable springmodel. However, the configurations shown in FIGS. 8 and 9 may be morepreferred than the consideration in FIG. 10 because it may be moredifficult to fabricate a very thin non-flat spring layer and also lessdesirable to have stress in the thin spring layer. Nevertheless, such adesign is within the spirit of the present invention.

It is appreciated that instead of using a continued curved or slopedspring contact surface as shown in FIGS. 8-10, a single or multipleleveled surfaces shown in FIGS. 6A-6B and FIGS. 7A-7C may be used toachieve a similar function.

One benefit of using the above illustrated curved wedge-shaped contactsurface is that, depending on the design parameters, it may make motionstoppers unnecessary. In general, motion stoppers between the springlayer and the substrate may be needed to limit the maximum displacementin order to avoid potential shorting. In the designs of the presentinvention shown in FIGS. 8-9, however, the displacement of the surfaceplate (840 and 940) may be inherently limited. Because an increase ofsuch displacement increases the contact area between the spring and thecontacting substrate, the effective length of the spring is decreasedwith an increase of the displacement. As a result, the effective springconstant in this new design will increase with the displacement.Depending on design requirements, an insulation layer (not shown) may beor may be not needed.

The exact manner the effective spring constant will increase with thedisplacement and/or deformation depends on the curved shape of thenon-flat surface (e.g., the surfaces of the shoulders 908 underneath thespring layer 920). Various methods, such as using oxidation, LOCOS-likeprocess, thermal reflow, annealing, or well controlled patterningprocess, are described below and may also used to make a desired curvedshape on a contacting surface.

Applications of the present invention in cMUT with embedded strings havedistinctive advantages over applications of the present invention inconventional cMUT with a flexible membrane. Beside of the inherentdrawbacks for the conventional cMUTs with a flexible membrane surface,there are some additional difficulties in accomplishing a variablespring constant in the conventional cMUT. First, a thick enoughinsulation layer is needed to prevent the device from the electricalshorting or breakdown. This is usually undesirable because a device withthe thick insulation layer usually has charging and hysteresis problemswhich degrade the transducer reliability performance. The parasiticcapacitance increases when there is a larger contact area. The activearea of the transducer surface may also decrease. Furthermore, a thickinsulation layer also degrades the device performance because theminimum electrode gap height is limited by the thickness of theinsulation layer. More minor issues such as relative large non-uniformelectrical field and displacement may also be a concern. The designs inFIG. 4 may solve the parasitic problem, but with a trade-off intransduction performance.

Equally important, because the spring, mass and electrodes of theconventional cMUTs (cMUTs with a flexible membrane) are dependent oneach other, the device lacks design flexibility to solve allabove-mentioned problems. For this reason, although the presentinvention may be used in all kinds of cMUTs, it may be moreadvantageously used in cMUTs with embedded strings as described hereinand in several other applications reference and incorporated herein.

Fabrication Methods:

The micro-electro-mechanical transducer in accordance with the presentinvention may be fabricated using a variety of methods. As discussedabove, for relatively simple shapes such as a single stepped aremultiple stepped surface involving a reasonably large transducing gap,conventional photolithography techniques may be used. However, to formmore refined shapes, a number of new methods as described below may beadvantageous.

FIGS. 11A-11C show a fabrication process for making a recess or recessesof a desired shape on an oxidizable substrate using oxidation anddiffusion barriers. This fabrication process illustrates general aspectsof an exemplary method that can be used for creating a recess orrecesses of a desired shape as part of a complete process in fabricatingthe micro-electro-mechanical transducer in accordance with the presentinvention. The method is particularly suitable for forming a recess onan oxidizable substrate such as silicon substrate. For example, processcan also be used to form a recess on an oxidizable top plate layer. Thesteps of the fabrication process are described below.

In step one (FIG. 11A), a layer or layers of diffusion barriers 1180,1182 and 1185 are grown or deposited on substrate 1101. The layers ofdiffusion barriers 1180, 1182 and 1185 are patterned according to adesired shape of the recess that needs to be made on the substrate 1101.In the example shown, the diffusion barriers 1180 and 1182 arematerial(s) that can partially block the gas (such as oxygen andhydrogen) diffusion in the next step, while the diffusion barrier 1185is a material that can completely or nearly completely block gasdiffusion in the next step. An exemplary material for diffusion barrier1180 or 1182 is an oxide which can partially stop or reduce furtheroxidation. An exemplary material for diffusion barrier 1185 is a nitridewhich can essentially stop oxidation therethrough. The exemplary patternformed has an opening 1189 with the substrate uncovered by the diffusionbarriers.

In step two (FIG. 11B), a thermal oxidation process is performed overthe diffusion barriers 1180, 1182 and 1185 (including the opening 1189)to form an oxide layer 1190. The resultant oxide layer reaches differentdepths at different sites. The oxidation depth is greatest underneaththe opening 1189 because the oxidation is not deterred in that area. Theoxidation depth is the second greatest through the area of diffusionbarrier 1180 uncovered by the diffusion barrier 1185 because thediffusion barrier 1185 only partially stops oxidation and is thinner.The oxidation depth is yet smaller through the area of diffusion 1182because it is a relatively thick layer of material partially stopsoxidation. The oxidation depth in the area covered by the diffusionbarrier 1185 is close to zero because the diffusion barrier 1185essentially stops further oxidation in that area. The depths of theoxide layer will be the basis for forming a recess of a desired shape inthe next step.

In step three (FIG. 11C), the diffusion barrier layers 1180, 1182, and1185 and the oxide layer 1190 are removed to form a recess of a shapehaving various depths 1111, 1112 and 1113.

The above process is an illustration of the basic aspects of the method.Various combinations of diffusion barriers, patterning, sizes andthicknesses may be used to achieve a desired shape for a recess on thesubstrate. The above method may also be repeated or combined to formmore complex recess patterns with various depths. Described in thefollowing are several exemplary processes used for fabricating a recessor recesses having a continuous shape with at least one wedge-likeshoulder portion.

FIGS. 12A-12D show an example of fabrication process for making a recessor recesses having a continuous shape and at least one wedge-likeshoulder portion using oxidation and diffusion barriers. The steps ofthe process are described below.

In step one (FIG. 12A), an oxide layer 1281 of a desired thickness and anitride layer 1282 are formed on substrate 1201.

In step two (FIG. 12B), the oxide layer 1281 and the nitride layer 1282are patterned. In the example shown, the opening 1283 is made throughthe oxide layer 1281 and nitride layer 1282 to have the substrate in theopening uncovered.

In step three (FIG. 12C), an oxidation process is performed over thesubstrate 1201 and the oxide and nitride pattern. Due to the effect ofthe oxide layer 1281 and the nitride layer 1282 as diffusion barriers,the new oxide layer 1284 reaches different depths in the substrate 1201at different locations to form a shape profile.

In step four (FIG. 12D), the nitride layer 1282 and the oxides 1281 and1284 are removed to form a recess 1290 which has a continuous shape andwedge-like shoulder portions as shown.

FIGS. 13A-13D show another example of fabrication process for making arecess or recesses having a continuous shape and at least one wedge-likeshoulder portion using oxidation and diffusion barriers. The steps ofthe process are described below.

In step one (FIG. 13A), an oxide layer 1381 of a desired thickness and anitride layer 1382 are formed on substrate 1301.

In step two (FIG. 13B), both the oxide layer 1381 and the nitride layer1382 are patterned. In the example shown, an opening 1383 is madethrough the nitride layer 1382, and in opening 1384 is made through theoxide layer 1381. The openings 1383 and 1384 have different sizes tocontrol a desired aspect of the shape of the recess to be formed.

In step three (FIG. 13C), an oxidation process is performed over thesubstrate 1301, the oxide and the nitride patterns. Due to the effect ofthe oxide layer 1381 as a partial diffusion barrier and the nitridelayer 1382 as a total diffusion barrier, the new oxide layer 1389reaches different depths in the substrate 1301 at different locations toform a shape profile.

In step four (FIG. 13D), the nitride layer 1382 and the oxides 1381 and1389 are removed to form a recess 1390 which has a continuous shape andwedge-like shoulder portions as shown.

As shown above, the size and shape of the recess formed using the abovetechniques are controlled by designing a particular pattern incombination of the diffusion barriers such as nitride and oxide. Someshapes may be achieved using a single diffusion barrier only. The aboveprocess therefore can be modified in many ways either to simplify theprocess or to further refine the shape of the final recess formed. Ingeneral, multiple layers of diffusion barriers and most sophisticatedpatterning allow more control and refinement of the process and theshape of the recess formed.

Following the concept demonstrated, sophisticated patterning may bedesigned to achieve a sophisticated shape of the recess, as furtherillustrated below.

FIGS. 14A-14E show another example of fabrication process for making arecess or recesses having a continuous shape with a controlled curvatureusing oxidation and diffusion barriers. The steps of the process aredescribed below.

In step one (FIG. 14A), an oxide layer 1481 of a desired thickness and anitride layer 1482 are formed on substrate 1401.

In step two (FIG. 14B and FIG. 14C), the nitride layer 1482 ispatterned. In the example shown, a plurality of openings 1484 are madethrough the nitride layer 1482. The plurality of openings 1484 areseparated by islands 1483. FIG. 14B shows a cross-sectional view of thenitride pattern having the plurality of openings 1484. FIG. 14C shows atop view of the same nitride pattern. In the example shown, the size ofeach individual opening 1484 and the distribution density of theopenings 1484 are carefully designed to achieve a particular shape ofthe recess to be made. In general, the size and/or the density of theopenings 1484 are greater at locations where a greater depth of therecess is to be formed. The profile of the size and density of theopenings 1483 can be designed to achieve precise control of the shape ofthe recess to be formed.

In step three (FIG. 14D), an oxidation process is performed over thesubstrate 1401, the patterns of the nitride layer 1482 and the oxidelayer 1481. Due to the effect of the oxide layer 1481 as a partialdiffusion barrier and the nitride layer 1482 as a total diffusionbarrier, and also due to the modulation effect of the nitride pattern,the new oxide layer 1485 reaches different depths in the substrate 1401at different locations to form a shape profile.

In step four (FIG. 14E), the nitride layer 1482, the oxide layer 1481,and the oxide layer 1485 are removed to form a recess 1490 which has acontinuous shape with a control the curvature as shown. In the exampleshown, the recess 1490 has two gradually curved shoulder portions 1491.

The above methods, and other methods described below, in addition to theconventional techniques such as photolithography, may be used in variouscombinations to fabricate a micro-electro-mechanical transducer inaccordance with the present invention. It is appreciated that thesemethods may be used to create a desired shape on a surface of variouscomponents in a micro-electro-mechanical transducer. For example, theabove method illustrated in FIGS. 14A-14E may be applied on a bottomlayer having a bottom electrode to form a shaped (non-flat) bottomelectrode. A membrane layer having a top electrode may be subsequentlyplaced on the top of the shaped bottom electrode to form amicro-electro-mechanical transducer in accordance with the presentinvention. The membrane layer may be placed directly on the graduallysloped shoulders 1491 to form a variable spring model.

The methods may also be used to form stepped surfaces in amicro-electro-mechanical transducer (such as that shown in FIGS. 6-7).Examples are shown below.

FIGS. 15A-15G show an exemplary fabrication process for making amicro-electro-mechanical transducer having a stepped surface. The stepsof the process are described below.

In step one (FIG. 15A), a thermal oxide 1510 is formed and patterned onsubstrate 1501.

In step two (FIG. 15B), another layer of thermal oxide 1512 is formedover the pattern of thermal oxide 1510. Because the first thermal oxide1510 functions as a partial diffusion barrier to further oxidation, thethermal oxide 1512 reaches different depths at different areas accordingto the pattern of the thermal oxide 1510. As shown in the next step,this will result in a stepped surface on the substrate 1501.

In step three (FIG. 15C), the thermal oxide layer 1512 is patterned toform an opening 1513 in preparation for forming a motion stopper with aninsulation extension. For fabricating a transducer that does not have amotion stopper, this step and the subsequent related aspects or steps ofthe procedure are optional.

In step four (FIG. 15E), yet another oxide layer 1514 is formed. Due tothe removal of the diffusion barrier (the oxide layer 1512) in the areaof the opening 1513, the oxide layer 1514 reaches deeper into thesubstrate 1501. This prepares for forming of a motion stopper with aninsulation extension in the following steps.

In step five (FIG. 15E), the thermal oxides (1510, 1512 and 1514) arepatterned and partially removed to form anchors 1530 and motion stopper1535 but leave the rest of the substrate uncovered. If needed, anchors1530 and motion stopper 1535 can also be formed from a new grown oxideafter completely removing the thermal oxide 1510 and 1512. In theparticular example shown, the motion stopper 1535 and the anchor 1530both have an insulation extension (e.g., 1535 a with the motion stopper1535) extending further into the substrate 1501 to enhance theinsulation without increasing the electrode gap. Due to the differentdepths reached by the second oxide 1512, the surface of the substrate1502 has a stepped feature as shown.

In this step, an optional insulation layer (not shown) may be formedover the stepped surface of the substrate 1501 with the resultantsurface maintains the stepped feature. The insulation layer is optional,especially when a motion stopper 1535 with an insulation extension 1535a has been formed.

In step six (FIG. 15F), a membrane layer 1520 is formed over the anchors1530 and motion stopper 1535. This may be done in a variety of ways. Forexample, an SOI wafer carrying a desired membrane layer may be bonded tothe substrate 1501 over the anchors 1530 and be etched back to leave themembrane layer 1520 on the substrate 1501.

In step seven (FIG. 15G), the metal layer 1525 is deposited andpatterned to form a top electrode. If the membrane layer 1520 isconductive, it may serve as an electrode thus requiring no furtherdeposition of the metal layer 1525. After this, the top layers includingthe membrane layer 1520 are etched through to separate individual cMUTelements.

FIGS. 16A-16G show another exemplary fabrication process for making amicro-electro-mechanical transducer having a stepped surface. The stepsof the process are described below.

In step one (FIG. 16A), a thermal oxide 1681 and nitride 1682 are formedand patterned on substrate 1601.

In step two (FIG. 16B), another layer of thermal oxide 1684 is formedover the pattern of thermal oxide 1681 and nitride 1682. Because thefirst thermal oxide 1681 functions as a partial diffusion barrier tofurther oxidation, and the nitride 1682 functions as a completediffusion barrier to further oxidation, the thermal oxide 1684 reachesdifferent depths at different areas according to the pattern of thethermal oxide 1681 and 1682. As shown in the next step, this will resultin a stepped surface on the substrate 1601.

In this step, further patterning and additional oxidation may beperformed in order to form a motion stopper with an insulation extensionas shown in the process of FIGS. 15A-15G.

In step three (FIG. 16C), the thermal oxides (1681 and 1684) and nitride1682 are removed. Due to the different depths reached by the secondoxide 1684, the surface of the substrate 1601 has a stepped feature asshown.

In step four (FIG. 16D), a thermal oxide is formed and patterned to formanchors 1630.

In step five (FIG. 16E), an insulation layer 1640 is formed over thestepped surface of the substrate 1601. The resultant surface maintainsthe stepped future as shown.

In step six (FIG. 16F), a membrane layer 1620 is formed over the anchors1630.

In step seven (FIG. 16G) a metal layer 1625 is deposited and patternedto form a top electrode. After this, the top layers including themembrane layer 1620 are etched through to separate individual cMUTelements.

FIGS. 17A-17E show an exemplary fabrication process to make localizednon-flat areas. In this particular example, the non-flat surface is toeffectuate a variable spring model and to enhance the electrical fieldin local areas. As illustrated below, the above methods illustrated inFIGS. 10-14 may also be used for such a purpose.

In step one (FIG. 17A), a thermal oxide 1781 and nitride 1782 are formedand patterned on substrate 1701. Small sizes of oxide 1781 and nitride1782 are used in this pattern in order to make localized non-flatsurfaces.

In step two (FIG. 17B), another layer of thermal oxide 1783 is formedover the pattern of thermal oxide 1781 and nitride 1782. Because thefirst thermal oxide 1781 functions as a partial diffusion barrier tofurther oxidation, and the nitride 1782 functions as a completediffusion barrier to further oxidation, the thermal oxide 1783 reachesdifferent depths at different areas according to the pattern of thethermal oxide 1781 and 1782. As shown in the next step, this will resultin raised areas having sloped (curved) shoulders on the substrate 1701.

In step three (FIG. 17C), the thermal oxides (1781 and 1783) and nitride1782 are removed. Due to the different depths reached by the secondoxide 1783, the surface of the substrate 1701 has raised areas 1730having sloped (curved) shoulders as shown. Optionally, an insulationlayer 1735 is formed over the top surface of the substrate 1701 to coverboth the raised areas 1730 and the flat areas. The raised areas 1730 maybe used as anchors to support a membrane layer or spring layer, so noseparate anchors may need to be formed.

In step four (FIG. 17D), an SOI layer 1703 including a membrane layer1720 is bonded over the raised areas 1730 which function as anchors.

In step five (FIG. 17E), the SOI layer 1703 is etched back to leave themembrane layer 1720 on the anchors (raised areas) 1730. If the membranelayer 1720 is made of non-conductive material that is unsuitable to bean electrode, a metal layer may be deposited and patterned to form a topelectrode. After this, the top layers including the membrane layer 1720are etched through to separate individual cMUT elements.

FIGS. 18A-18F show an alternative fabrication process to make localizednon-flat areas to effectuate a variable spring model and to enhance theelectrical field in local areas. As shown, the alternative method doesnot use the oxidation process as described above. The steps of thisalternative method are described below.

In step one (FIG. 18A), a substrate 1801 are patterned to form posts1831.

In step two (FIGS. 18B and 18C), the corners of posts 1831 are roundedto form anchors 1830 having rounded (and sloped) shoulders. This can beaccomplished using a number of techniques. With option 1 shown in FIG.18B, an oxidation layer 1839 is first formed over the posts 1831, and isthen removed to form the anchors 1830 having rounded shoulders. Withoption 2 shown in FIG. 18C, the corners of the posts 1830 are rounded byusing hydrogen annealing at a proper temperature.

In step three (FIG. 18D), an insulation layer 1835 is formed over thetop surface of the substrate 1801 to cover both the anchors 1830 and theflat areas.

In step four (FIG. 18E), a membrane layer 1820 is placed over theanchors 1830. This can be accomplished using a number of methods,including using SOI bonding technology as described previously.

In step five (FIG. 18F), if the membrane layer 1820 is made ofnon-conductive material that is unsuitable to be an electrode, a metallayer 1825 may be deposited and patterned to form a top electrode. Afterthis, the top layers including the membrane layer 1820 are etchedthrough to separate individual cMUT elements.

It is appreciated that although the above fabrication processes areillustrated using exemplary cMUT structures, the methods can be used tomake a non-flat surface in other CMUT designs to form a variable springmodel or form a non-uniform electrode gap. For example, similar non-flatsurfaces may be formed on the substrate, spring layer, or surface platelayer in the CMUTs with embedded springs.

In addition to the methods described above, a non-flat surface in themicro-electro-mechanical transducer in accordance with the presentinvention may be made using a number of other methods. For example, arecess or recesses of a desired shape may be made by bending a layerwith a desired thickness profile. In general, a layer with the desiredthickness profile may be first formed by a proper process. The layer isthen attached to another layer, such as a substrate with a desiredpattern, to form cavities therebetween. Thereupon, a proper process isused to push selective areas of the layer with the thickness profiledown to attach to the substrate layer. The surface of the bent layerthus forms a non-flat surface. The method may be used to form a non-flatsurface on either the substrate, membrane, or the surface plate in anyCMUT. Examples of the method are described below.

FIGS. 19A-19H show an alternative fabrication process to make a non-flatsurface in the micro-electro-mechanical transducer in accordance withthe present invention. The steps of the process are described below.

In step one (FIG. 19A), cavities 1906 and posts 1905 are formed onsubstrate 1901 two partially define the shape of the bottom electrode tobe formed.

In step two (FIG. 19B), a first membrane layer 1910 is formed over thecavities 1906 and posts 1905. This may be accomplished in a number ofways, including bonding a prime wafer, grinding and polishing the primewafer to a desired thickness; and bonding an SOI wafer with a desiredmembrane layer and action back the SOI wafer. The bonding may beperformed in vacuum.

In step three (FIGS. 19C-19E), the first membrane layer 1910 is bent toform a desired non-flat shape of the bottom electrode. If the firstmembrane layer 1910 and the substrate 1901 cannot adequately provide thefunction of a bottom electrode, a separate metal layer (not shown) maybe deposited to form the bottom electrode.

Bending of the membrane layer 1910 may be accomplished in a number ofways. In option one shown in FIG. 19C, the wafer is annealed in anenvironment with a desired temperature and pressure to cause themembrane layer 1910 to bend down in unsupported areas. When properlycontrolled, the dropped portions of the membrane layer 1910 may touchthe substrate 1901 and permanently bond with it.

In option two shown in FIG. 19D, the membrane layer 1910 is doped with adesired doping material 1915 to create a doping profile that introducesa desired stress profile in the membrane. The selectively stressedmembrane layer 1910 is then annealed to cause pending. In the exampleshown, the membrane layer 1910 is spent to touch the substrate 1901 andpermanently bonded with it after the annealing process.

In option three shown in FIG. 19E, a layer 1916 of a desired material(e.g., thermal oxide, LTO, or silicon nitride) with a desired internalstress (such as a bimorph structure) is formed or deposited on themembrane layer 1910 to bend the membrane layer 1910 to a desired shapeas shown. The bent membrane 1910 may touch the substrate 1901 andpermanently bond with it after the bending process.

After bending, the bent first membrane layer 1910 and the substrate 1901may together function as a bottom electrode if a conductive material isused for these two layers. However, a separate conductive layer (notshown) may be introduced on or beneath the membrane layer 1910 as thebottom electrode, shaped similarly to the bent membrane layer 1910. Aninsulation layer (e.g., oxide or nitride) may be grown either on ashaped electrode or on the membrane layer 1910 before bonding the secondmembrane layer as shown below.

In step four (FIGS. 19F and 19G), a second membrane layer (spring layer)1920 is introduced over the bent first membrane layer 1910 which hasraised areas 1911 having sloped shoulders to support the second membranelayer (spring layer) 1920. Two slightly different options to accomplishthis are described in FIG. 19F and FIG. 19G. In option 1 shown in FIG.19F, the second membrane layer 1920 is placed on the bent first membranelayer (including a shaped bottom electrode) and is supported by the samedirectly. In option 2 shown in FIG. 19G, a thick insulation layer (e.g.,oxide or nitride) is grown and patterned as anchors 1918, and the secondmembrane layer 1920 is then bonded to the anchors 1918 and supported bythe same.

In step five (FIG. 19H), a metal layer 1925 is deposited and patternedas a top electrode. The second (top) membrane layer 1920 and metal layer1925 are then etched to separate the cMUT elements.

FIGS. 20A-20F show another fabrication process to make a non-flatsurface in the micro-electro-mechanical transducer in accordance withthe present invention. The steps of the process are described below.

In step one (FIG. 20A), a desired recession pattern 2071 is formed on awafer 2070, which may be either a prime wafer or an SOI wafer. An SOIwafer may be preferred in this step if the membrane thickness needs tobe precisely controlled.

In step two (FIG. 20B), the wafer 2070 is further patterned to definethe shapes of the membrane to be formed. In the example shown, thepattern has posts 2072 and posts 2074 having different heights. Theposts define cavities on the wafer 2070.

In step three (FIG. 20C), the patterned wafer 2070 is bonded withanother wafer 2001. After bonding, the patterned wafer 2070 is groundedand polished (or etched back if an SOI wafer was used) to a membrane2070 of a desired thickness. The bonding may be performed in vacuum. Asshown, after bonding, the membrane 2070 is supported by the taller posts2074, while the shorter posts 2072 do not reach far enough to contactthe substrate 2001.

In step four (FIG. 20D), the membrane 2070 is bent down using a propermethod, such as any of the methods described in step three in FIGS.19C-19E. As a result of bending, the membrane 2070 now has raised parts2075 and depressed areas 2076. As shown, the raised parts 2075 each hasrounded (and sloped) shoulders. The shape of the lower parts 2076 may becontrolled by the width of the posts 2072. As shown, when relativelywide posts 2072 are used, the lower parts 2076 may have a relativelyflat surface. If narrower posts 2072 are used, the lower parts 2076 mayhave a more curved shape that is closer to the shape of the membrane1910 shown in FIG. 19.

After bending, the shorter posts 2072 of the membrane 2070 may touch thebottom of the cavity on the substrate 2001 and be bonded with it using aproper treatment.

In step five (FIGS. 20E and 20F), a second membrane layer (spring layer)2020 is introduced over the first bent membrane layer 2070 which hasraised parts 2075 having sloped shoulders to support the second membranelayer (spring layer) 2020. Two slightly different options to accomplishthis are described in FIGS. 20E and 20F. In option 1 shown in FIG. 20E,the second membrane layer 2020 is placed on the first bent membranelayer 2070 (including a shaped bottom electrode) and is supported by thesame directly. An optional insulation layer 2080 is also shown in FIG.20E. In option 2 shown in FIG. 20F, a thick insulation layer (e.g.,oxide or nitride) is grown and patterned as anchors 2018, and the secondmembrane layer 2020 is then bonded to the anchors 2018 and supported bythe same. In this step, metal layer 2025 may also be deposited andpatterned as a top electrode. The second (top) membrane layer 2020 andmetal layer 2025 are then etched to separate the cMUT elements.

FIGS. 21A-21E show another fabrication process to make a non-flatsurface in the micro-electro-mechanical transducer in accordance withthe present invention. The process is similar to the process describedin FIGS. 19A-19H. The steps of the process are described below.

In step one (FIG. 21A), cavities 2106 and posts 2105 are formed onsubstrate 2101 two partially define the shape of the bottom electrode tobe formed.

In step two (FIG. 21B), a first membrane layer 2170 is formed over thecavities 2106 and posts 2105.

In step three (FIG. 21C), the first membrane layer 2170 is bent to forma desired non-flat shape of the bottom electrode. An optional insulationlayer 2175 is also shown. Bending of the membrane layer 2170 may beaccomplished in a number of ways as described in FIGS. 19C-19E). Unlikethat in FIG. 19, the membrane layer 2170 is bent upward to form raisedareas 2180.

After bending, the bent first membrane layer 2170 and the substrate 2101may function as a bottom electrode if a conductive material is used forthese two layers. However, a separate conductive layer (not shown) maybe introduced on or beneath the membrane layer 2170 as the bottomelectrode, shaped similarly to the bent membrane layer 2170.

In step four (FIGS. 21D and 21E), a second membrane layer (spring layer)2120 is introduced over the bent first membrane layer 2170 which hasraised areas 2180 having sloped shoulders to support the second membranelayer (spring layer) 2120. Two slightly different options to accomplishthis are described in FIGS. 21D and 21E. In option 1 shown in FIG. 21D,the second membrane layer 2120 is placed on the bent first membranelayer 2170 (including a shaped bottom electrode) and is supported by thesame directly. In option 2 shown in FIG. 21F, a thick insulation layer(e.g., oxide or nitride) is grown and patterned as anchors 2185, and thesecond membrane layer 2120 is then bonded to the anchors 2185 andsupported by the same.

FIGS. 22A-22E show another fabrication process to make a non-flatsurface in the micro-electro-mechanical transducer in accordance withthe present invention. The steps of the process are described below.

In step one (FIG. 22A), a desired recession pattern is formed on a wafer2270.

In step two (FIG. 22B), the wafer 2270 is further patterned to definethe shapes of the membrane to be formed. In the example shown, thepattern has posts 2272 and posts 2274 having different heights. Theposts define cavities on the wafer 2270.

In step three (FIG. 22C), the patterned wafer 2270 is bonded withanother wafer 2201. After bonding, the patterned wafer 2270 is groundedand polished (or etched back if an SOI wafer was used) to a membrane2270 of a desired thickness. The bonding may be performed in vacuum. Asshown, after bonding, the membrane 2270 is supported by the taller posts2274, while the shorter posts 2272 do not reach far enough to contactthe substrate 2201.

In step four (FIG. 22D), the membrane 2270 is bent upward using a propermethod, such as any of the methods described in step three in FIGS.19C-19E. As a result of bending, the membrane 2270 now has raised parts2275 and depressed areas 2276. As shown, the raised parts 2275 each hasrounded (and sloped) shoulders. The shape of the lower parts 2276 may becontrolled by the width of the posts 2274. As shown, when relativelywide posts 2274 are used, the lower parts 2276 may have a relativelyflat surface. If narrower posts 2274 are used, the lower parts 2276 mayhave a more curved shape that is closer to the shape of the membrane1910 shown in FIG. 19.

In step five (FIG. 22E), a second membrane layer (spring layer) 2220 isintroduced over the first bent membrane layer 2270 which has raisedparts 2275 having sloped shoulders to support the second membrane layer(spring layer) 2220. An optional insulation layer 2279 may also be used.

The methods of the present invention may also be used being springembedded micromachined ultrasonic transducers (ESMUT) as disclosed inthe several patent applications referenced and incorporated herein.Examples are described below.

FIGS. 23A-23I show a fabrication process to make ESMUT having a non-flatsurface in accordance with the present invention. The steps of thefabrication process are described below.

The first five steps (FIGS. 23A-23E) are similar to that described inFIGS. 17A-17E. In step one (FIG. 23A), a thermal oxide 2381 and nitride2382 are formed and patterned on a plate layer 2340 which is a part ofan SOI wafer 2302. Alternatively, instead of using an SOI wafer, aprimal wafer may be used which can be grounded and polished to form theplate layer 2340. Small sizes of oxide 2381 and nitride 2382 are used inthis pattern in order to make localized non-flat surfaces.

In step two (FIG. 23B), another layer of thermal oxide 2383 is formedover the pattern of thermal oxide 2381 and nitride 2382. Because thefirst thermal oxide 2381 functions as a partial diffusion barrier tofurther oxidation and the nitride 2382 functions as a complete diffusionbarrier to further oxidation, the thermal oxide 2383 reaches differentdepths at different areas according to the pattern of the thermal oxide2381 and 2382. As shown in the next step, this will result in raisedareas having sloped (curved) shoulders on the plate layer 2340.

In step three (FIG. 23C), the thermal oxides (2381 and 2383) and nitride2382 are removed. Due to the different depths reached by the secondoxide 2383, the surface of the plate layer 2320 has raised areas 2330having sloped (curved) shoulders as shown. Optionally, an insulationlayer 2335 is formed over the top surface of the substrate 2301 to coverboth the raised areas 2330 and the flat areas. The raised areas 2330 maybe used as anchors to support a spring layer, so no separate anchorsneed to be formed.

In step four (FIG. 23D), an SOI layer 2303 including a spring layer 2320is bonded over the raised areas 2330 which function as anchors.

In step five (FIG. 23E), the SOI layer 2303 is etched back to leave thespring layer 2320 on the anchors (raised areas) 2330.

In step six (FIG. 23F), the wafer from the step five is bonded to asilicon wafer 2301 which has a cavity pattern 2312 and anchors 2310 todefine the spring shapes. The wafer from the step five may also bebonded to a substrate with through-wafer connections, a PCB, or a waferwith desired ICs using proper bonding technologies.

In step seven (FIG. 23G), the handle wafer and the box (oxide) of theSOI wafer 2302 are removed to form surface plate 2340.

In step eight (FIG. 23H), a metal layer 2345 is deposited and patternedas the top electrode. The bottom electrode is located either on thespring layer 2320 or the silicon wafer 2301. If the spring layer 2320 ismade of non-conductive material that is unsuitable to be an electrode, ametal layer (not shown) may be deposited and patterned to form a bottomelectrode.

In step nine (FIG. 23I), the surface plate 2340 and spring layer 2320are patterned by forming trenches 2355 to separate the cMUT elements.

FIGS. 24A-24I show another fabrication process to make ESMUT having anon-flat surface in accordance with the present invention. The steps ofthe fabrication process are described below.

The first five steps (FIGS. 24A-24E) are similar to that described inFIGS. 17A-17E. In step one (FIG. 24A), a desired recession pattern 2481is formed on a wafer 2402, which may be either a prime wafer or an SOIwafer.

In step two (FIG. 24B), the wafer 2402 is further patterned to definethe shapes of the membrane to be formed. In the example shown, thepattern has posts 2411 and posts 2410 having different heights. Theposts define cavities on the wafer 2402.

In step three (FIG. 24C), the patterned wafer 2402 is bonded withanother wafer 2401. After bonding, the patterned wafer 2402 is groundedand polished (or etched back if an SOI wafer was used) to a membrane2402 of a desired thickness. The bonding may be performed in vacuum. Asshown, after bonding, the membrane 2402 is supported by the taller posts2410, while the shorter posts 2411 do not reach far enough to contactthe substrate wafer 2401.

In step four (FIG. 24D), the membrane 2402 is bent down using a propermethod, such as any of the methods described in step three in FIGS.19C-19E. As a result of bending, the membrane 2402 now has raised parts2409 and depressed areas 2407. As shown, the raised parts 2409 each hasrounded (and sloped) shoulders 2408. The shape of the raised parts 2409may be control the by the width of posts to 410. As shown, whenrelatively wide posts 2410 are used, the raised parts 2409 may have arelatively flat top surface. If narrower posts to 410 are used, theraised parts 2409 may have a more curved or appointed shape that iscloser to the shape of the membrane 1910 shown in FIG. 19. Likewise, theshape of the lower parts to fault 07 may be controlled by the width ofthe posts 2411

After bending, the shorter posts 2411 of the membrane 2401 may touch thebottom of the cavity on the substrate 2401 and be bonded with it using aproper treatment.

In step five (FIG. 24E), a spring layer 2420 is introduced over the bentmembrane 2402 which has raised parts to 2409 having sloped shoulders2408 to support the spring 2420. As shown in FIG. 24E, the spring layer2420 is placed on the bent membrane layer 2401 (including a shapedbottom electrode not shown) and is supported by the same directly.

In step six (FIG. 24F), an insulation layer (e.g., thermal oxide, ornitride) is grown (or deposited) and patterned to form the plate-springconnectors 2430 on the spring layer 2420.

In step seven (FIG. 24G), an SOI wafer (or a prime wafer) with desiredsurface plate 2440 is bonded over on the plate-spring connectors 2430.The SOI wafer (or a prime wafer) is processed to leave the surface plate2440 on the plate-spring connectors.

In step eight (FIG. 24H), a metal layer 2445 is deposited and patternedas the top electrode.

In step nine (FIG. 24I), trenches 2455 are formed through the surfaceplate 2440 and the spring layer 2420 to separate the cMUT elements.

FIGS. 25A-25I show another fabrication process to make ESMUT having anon-flat surface in accordance with the present invention. The steps ofthe fabrication process are described below.

The first five steps (FIGS. 25A-25E) are similar to that described inFIGS. 22A-22E. In step one (FIG. 25A), a desired surface pattern 2582 isformed on a wafer 2570.

In step two (FIG. 25B), the wafer 2570 is further patterned to definethe shapes of the membrane to be formed. In the example shown, thepattern has posts 2572 and posts 2574 having different heights. Theposts define cavities on the wafer 2570.

In step three (FIG. 25C), the patterned wafer 2570 is bonded withanother wafer 2501. After bonding, the patterned wafer 2570 is groundedand polished (or etched back if an SOI wafer was used) to a membrane2570 of a desired thickness. The bonding may be performed in vacuum. Asshown, after bonding, the membrane 2570 is supported by the taller posts2574, while the shorter posts 2572 do not reach far enough to contactthe substrate 2501.

In step four (FIG. 25D), the membrane 2570 is bent upward using a propermethod, such as any of the methods described in step three in FIGS.19C-19E. As a result of bending, the membrane 2570 now has raised parts2575 and depressed areas 2576. As shown, the raised parts 2575 each hasrounded (and sloped) shoulders 2508. The shape of the raised parts 2575may be controlled by the width of the posts 2572. As shown, whenrelatively wide posts 2572 are used, the raised parts 2572 may have arelatively flat top surface. Likewise, the shape of the lower parts 2576may be controlled by the width of the posts 2574.

In step five (FIG. 25E), a second membrane layer (spring layer) 2520 isintroduced over the bent membrane layer 2570 which has raised parts 2575having sloped shoulders to support the spring layer 2520.

In step six (FIG. 25F), an insulation layer (e.g., thermal oxide, ornitride) is grown (or deposited) and patterned to form the plate-springconnectors 2530 on the spring layer 2520.

In step seven (FIG. 25G), an SOI wafer (or a prime wafer) with desiredsurface plate 2540 is bonded over on the plate-spring connectors 2530.The SOI wafer (or a prime wafer) is processed to leave the surface plate2540 on the plate-spring connectors.

In step eight (FIG. 25H), a metal layer 2545 is deposited and patternedas the top electrode.

In step nine (FIG. 25I), trenches 2555 are formed through the surfaceplate 2540 and the spring layer 2520 to separate the cMUT elements.

In general, the present invention introduces several unique methods toform a non-flat surface. One distinctive example is using oxidationcombined with patterning of diffusion barriers to form a recess ofvarious shapes. Another distinctive example is forming a non-flatsurface with raised portions or dropped portions by bending a layerhaving a certain thickness profile attached to another layer. Althoughdistinctive from each other, these methods may be used to accomplishsimilar purposes and are often interchangeable for fabrication purposes.The methods to form a non-flat surface may be used in free combinationwith any proper fabrication processes to make a micro-electro-mechanicaltransducer having a non-flat surface. Depending on the design, anon-flat surface may be that of a substrate, a spring layer, a connectoror anchor, a plate, or any combination thereof. If multiple non-flatsurfaces (or multiple non-flat areas of a certain surface) need to bemade according to a certain design, either a single method or acombination of several methods as described herein may be used.

It is appreciated that, although the variable springs in accordance withthe present invention are illustrated using several particular designsof cMUT, the designs and fabrication methods for the cMUT with variablesprings can be applied to a cMUT of any other designs, including cMUTswith embedded springs configured differently from the examples shownherein.

Since the device parameters in the cMUT with embedded springs can bedesigned nearly independently, the equivalent spring constant of thecMUT with embedded springs may be designed to increase with thedisplacement as desired without any trade-off with other deviceperformances. As a result, the cMUT with embedded springs may operatelike an idea parallel plate capacitor but still be able to increase thecollapse voltage of the transducer. With the design in accordance withthe present invention, particularly when applied in the cMUT withembedded springs, it may be possible to push the collapse voltagesignificantly higher than the operation voltage range to nearly entirelyavoid collapse. The cMUT with variable springs may have a maximumdisplacement nearly as large as the total electrode separation gap, incontrast to the roughly ⅓ of the electrode separation gap for an ideaparallel plate capacitor with a constant spring constant. Theperformance of the cMUT can therefore be dramatically improved by thisapproach.

Furthermore, with a proper design in accordance with the presentinvention, the two electrodes of the cMUT with embedded variable springsmay practically never contact each other, thus potentially eliminatingthe need of an insulation layer.

Furthermore, the cMUT with embedded springs in accordance with thepresent invention may operate nearly like an idea parallel capacitor inall operation range (although it is within the purview of the presentinvention to have a nonparallel or nonuniform capacitor to improve thedynamic uniformity in operation, particularly when applied toconventional membrane-based cMUTs). The cMUT with embedded variablesprings in accordance with the present invention has potential to solvemany problems of the conventional cMUT. Moreover, the cMUT with embeddedvariable springs is expected to have much better performance in otherrespects as well, as disclosed in the several patent applicationsreferenced and incorporated in this description.

The cMUT of the present invention, including that with embedded variablesprings, may be fabricated by the whole or part of the methods describedherein, further in combination with the methods (e.g., wafer-bonding,surface micromachining, or any combination of two technologies)described in the several patent applications reference to andincorporated in this description. The material selection for each layerin the design of the present invention is similar to that described inthose referenced and incorporated patent applications.

Other refinement of the design may also be considered. For example, in acMUT, if two surfaces may contact each other during the operation, thesurfaces may desirably be rough in order to reduce the total contactarea. Examples of such contacting surfaces include the flexible cMUTmembrane and the bottom surface of the cavity for a cMUT with flexiblemembranes, and the spring layer and the bottom surface of the cavity fora cMUT with embedded springs. The contacting surfaces may be made roughby patterning the surface to a desired pattern. The contacting surfacesmay also be roughed by chemical etching or plasma etching (usually withvery slow etching rate) in a desired area.

In addition, a perfect vacuum may not be achieved in a sealed cMUTcavity. For a certain cMUT design, because the volume of a cavity may bedramatically shrunk during the operation, any residual air may causeproblems such as high pressure buildup. In order to avoid of theundesired high pressure buildup, buffer trenches may be formed on thecavity surface. The trenches may be fabricated by patterning the bottomof the cavity after the bottom surface of the cavity is formed.

FIGS. 26A-26D show an exemplary fabrication process to roughen thebottom surface of the cavity and to fabricate buffer trenches on thebottom of the cavity. The steps of the process are described below.

In step one (FIG. 26A), a curved surface is formed on substrate 2601.The contacting surface 2602 needs to be roughened. The exemplarycontacting surface 2602 is the area where the top and bottom surfaces ofthe wedge-shaped cavity contact during operation of the cMUT.

In step two (FIG. 26B), buffer trenches 2691 are formed on the bottomsurface of the cavity on substrate 2601.

In step three (FIG. 26C), flexible membrane or spring layer 2620 isplaced over the cavity.

In step four (FIG. 26D), the flexible membrane or spring layer 2620makes contact with the contacting surface 2602 of the cavity duringoperation.

The roughened contacting surface 2602 is shown in the zoomed window. Asshown, the contacting surface is roughened by etching spots 2695.

The micro-electro-mechanical transducer in accordance with the presentinvention has been described in detail along with the figures andexemplary embodiments. The design of the micro-electro-mechanicaltransducer of the present invention is particularly suitable forapplications in capacitive micromachined ultrasonic transducers (cMUT),but can also be used in other micro-electro-mechanical devices whichhave a movable mechanical part to transform energy.

In particular, the micro-electro-mechanical transducer in accordancewith the present invention may be fabricated using the fabricationmethods or incorporated in the micro-electro-mechanical transducer asdisclosed in international patent applications (PCT) No.PCT/IB2006/051566, entitled THROUGH-WAFER INTERCONNECTION, filed on May18, 2006; No. PCT/IB2006/051567, entitled METHODS FOR FABRICATINGMICRO-ELECTRO-MECHANICAL DEVICES, filed on May 18, 2006; No.PCT/IB2006/051568, entitled MICRO-ELECTRO-MECHANICAL TRANSDUCERS, filedon May 18, 2006; No. PCT/IB2006/051569, entitledMICRO-ELECTRO-MECHANICAL TRANSDUCERS, filed on May 18, 2006; and No.PCT/IB2006/051948, entitled MICRO-ELECTRO-MECHANICAL TRANSDUCER HAVINGAN INSULATION EXTENSION, filed on Jun. 16, 2006. These patentapplications are hereby incorporated herein by reference.

In the foregoing specification, the present disclosure is described withreference to specific embodiments thereof, but those skilled in the artwill recognize that the present disclosure is not limited thereto.Various features and aspects of the above-described disclosure may beused individually or jointly. Further, the present disclosure can beutilized in any number of environments and applications beyond thosedescribed herein without departing from the broader spirit and scope ofthe specification. We claim all such modifications and variations thatfall within the scope and spirit of the claims below. The specificationand drawings are, accordingly, to be regarded as illustrative ratherthan restrictive. It will be recognized that the terms “comprising,”“including,” and “having,” as used herein, are specifically intended tobe read as open-ended terms of art.

I claim:
 1. A method for a capacitive micromachined ultrasoundtransducer (cMUT), the method comprising: growing and patterning adiffusion barrier layer over a surface of a base layer, the diffusionbarrier layer having a first area and a second area, the first areaallowing more diffusion penetration therethrough than the second area;performing a diffusion process over the diffusion barrier layer suchthat a diffusion reactivated material reaches a first depth into thebase layer below the first area; forming an anchor using the diffusionreactivated material, such that the anchor has a lower portion below amajor surface of the base layer and an upper portion above the majorsurface of the base layer; and forming a cover layer over the anchor andthe base layer, wherein the base layer has a first electrode, the coverlayer has a second electrode opposing the first electrode to define agap width therebetween, and at least one of the cover layer and the baselayer includes a flexible layer, such that the first electrode and thesecond electrode are movable relative to each other to cause a change ofthe gap width.
 2. The method of claim 1, where the second area of thediffusion barrier layer allows substantially no diffusion penetrationinto the base layer.
 3. The method of claim 1, where the second area ofthe diffusion barrier layer allows partial diffusion penetration intothe base layer, such that the diffusion reactivated material reaches asecond depth into the base layer below the second area, the second depthbeing smaller than the first depth.
 4. The method of claim 3, furthercomprising: removing at least a part of the diffusion barrier layer andthe diffusion reactivated material at the second area to form a recesson the surface of the base layer.
 5. The method of claim 1, wherein thediffusion barrier layer has a third area allowing more diffusionpenetration therethrough than the second area, and the diffusionreactivated material reaches into the base layer below the third area,the method further comprising: forming a motion stopper using thediffusion reactivated material at the third area, such that the motionstopper has a lower portion below the major surface of the base layerand an upper portion above the major surface of the base layer, theupper portion of the motion stopper being shorter than the upper portionof the anchor.
 6. The method of claim 1 wherein the base layer comprisesa conductive substrate constituting at least a part of the firstelectrode.
 7. The method of claim 1 wherein the forming the cover layercomprises: bonding an SOI layer carrying the cover layer over the baselayer; and etching back the SOI layer to leave the cover layer over thesurface of the base layer.
 8. The method of claim 1 wherein thediffusion barrier layer comprises at least an oxide layer.
 9. The methodof claim 1 wherein the diffusion barrier layer comprises a nitridelayer.
 10. The method of claim 1 wherein the diffusion process comprisesthermal oxidation.
 11. The method of claim 1 wherein the diffusionreactivated material comprises an oxide.
 12. The method of claim 1wherein the growing and patterning the diffusion barrier layercomprises: growing and patterning a first diffusion barrier layer overthe surface of a base layer; and growing and patterning a seconddiffusion barrier layer over the first diffusion barrier layer.
 13. Amethod for a capacitive micromachined ultrasound transducer (cMUT), themethod comprising: growing and patterning a diffusion barrier layer overa surface of a base layer, the patterned diffusion barrier layer havinga first area and a second area, the first area allowing more diffusionpenetration therethrough than the second area; performing a diffusionprocess over the diffusion barrier layer such that a diffusionreactivated material reaches a first depth into the base layer below thefirst area; a second depth into the base layer below the second area,the first depth being greater than the second depth; forming an anchorusing a second diffusion reactivated material, the anchor having a topportion higher than the surface of the base layer; and forming a coverlayer over the anchor and the base layer, wherein the base layer has afirst electrode, the cover layer has a second electrode opposing thefirst electrode to define a gap width therebetween, and at least one ofthe cover layer and the base layer includes a flexible layer, such thatthe first electrode and the second electrode are movable relative toeach other to cause a change of the gap width.
 14. The method of claim11 wherein the anchor is formed in the first area.
 15. The method ofclaim 11 wherein the anchor is formed in the second area.
 16. The methodof claim 11 wherein the forming the anchor comprises at least partiallypatterning the second diffusion reactivated material.
 17. The method ofclaim 11, further comprising: growing and patterning a second diffusionbarrier layer over the surface of the base layer, the second diffusionbarrier layer having a third area and a fourth area, the third areaallowing more diffusion penetration therethrough than the fourth area;and performing a second diffusion process over the second patterneddiffusion barrier layer, such that a second diffusion reactivatedmaterial reaches a third depth into the base layer below the third areaand a fourth depth into the base layer below the fourth area, the thirddepth being greater than the fourth depth.
 18. The method of claim 11wherein the diffusion process comprises thermal oxidation.
 19. Themethod of claim 11 wherein the diffusion reactivated material is anoxide.